半导体光刻中的pitch是什么意思
答案:1 悬赏:10
解决时间 2021-04-21 14:20
- 提问者网友：無奈小影
- 2021-04-20 18:05
半导体光刻中的pitch是什么意思
最佳答案
- 二级知识专家网友：一起来看看吧
- 2021-04-20 19:04
pitch=line+space
minmum line or space determines photo & etch's capability. Different pitch, photo characteristic is different, different pitch, etch bais is different.
minmum line or space determines photo & etch's capability. Different pitch, photo characteristic is different, different pitch, etch bais is different.
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